An All-Digital On-Chip Process-Control Monitor for Process-Variability Measurements
Fabian Klass, Ashish Jain, Greg Hess, Brian Park · 2008
Process variability has become a major challenge in nanometer technologies. Understanding process variability is therefore a key to designing successful low-power multi-million gate SoCs. An all-digital on-chip process control-monitor (PCM) that measures process variability is described.