Extracting of removal function in CCOS based on edge detection algorithm
Jian Liu, Shaozhi Wang, Linghua Zhang, Huanan Chen · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013
In order to realize removal function model building with high precision in computer controlled optical polishing process, a kind of new algorithm is proposed in this paper, which was based on edge detection technology. The algorithm preprocesses the interferometric metrology result and inverts it into digital image data at first. And then the Canny edge detecting operator and Hough transform are used to detect and extract the image edge. At last the boundary of the removal function was acquired. The center of removal function boundary was allocated quickly in this algorithm, which was assisted with the particularly center position. It reduced a lot of blind calculation for the target center of circle accumulating counts. At last, the experiment result indicated the algorithm in this paper could be used in removal function modeling and dwell time optimization solving.