Embedded Flash on 90nm Logic Technology & Beyond for FPGAs
Hisashi Kojima, Taiji Ema, T. Anezaki, J. Ariyoshi, Hiroshi Ogawa, K. Yoshizawa, Sanjeev Mehta, Scott W. Fong, S. Logie, R. Smoak, David B. Rutledge · 2007
We have successfully integrated an embedded flash technology into a 90 nm leading edge logic technology to realize superior FPGA products with only 10% additional process steps. The stacked gate memory cell is completely compatible with Cu and a low-k interconnection and has excellent flash reliability. Achieving the same logic performance as the non-embedded technology maximizes the utilization of design resources between the non-embedded technology and the embedded flash technology.