Automatic mesh adaptivity for finite element simulation of multilayer MEMS
Jens-Dominik Müeller, Jan Gerrit Korvink · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000
We have produced an automatic method with which to simulate the structural response of prestressed multi-layer plate and beam micro- structures accurately and reliably. The method relives the microsystem designer of the burden of finite element mesh design by performing local mesh refinement. A coarse mesh is iteratively refined according to an error that is computed directly from the finite element solution. The refinement strategy covers locally prestressed regions, plate composition inhomogeneities, and singular loads, yielding an optimized mesh and a highly accurate computed deformation.