Efficient process-hotspot detection using range pattern matching
Hailong Yao, Soham Sinha, C. Chiang, Xinyuan Hong, Yunlong Cai · Digest of technical papers/Digest of technical papers - IEEE/ACM International Conference on Computer-Aided Design · 2006
In current manufacturing processes, certain layout configurations are likely to have reduced yield and/or reliability due to increased susceptibility to stress effects or poor tolerance to certain processes like lithography. These problematic layout configurations need to be efficiently detected and eliminated from a design layout to enable better yield. In this paper, such layout configurations are called processhotspots and an efficient and scalable algorithm is proposed to detect such process-hotspots in a given layout.