A method for the measurement of capacitance, series and shunt resistances of semiconductor junctions
G Popkirov · Journal of Physics E Scientific Instruments · 1981
A method and an electronic circuit for measuring the capacitance, series and shunt resistances of semiconductor junctions are described. The method is based on comparing the charging curves of the sample under test and of a reference capacitor with series and shunt resistors connected to it, obtained with square-wave current pulses.