A Lossless Circuit Layout Image Compression Algorithm for Maskless Lithography Systems
Jeehong Yang, Serap A. Savari · 2010
We introduce a transform-based technique to represent a circuit layout image so that 1) it typically leads to better compression ratios for maskless lithography systems than Block C4, the state-of-the-art compression scheme for this application, and 2) it permits faster encoding and less complex decoding than Block C4, while 3) it requires a similar amount of memory for decoding.