Complementary Logic Inverters: High‐Performance Hybrid Complementary Logic Inverter through Monolithic Integration of a MEMS Switch and an Oxide TFT (Small 12/2015)
Yong-Ha Song, Sang‐Joon Kenny Ahn, Min-Wu Kim, J.S. Lee, Chi‐Sun Hwang, Jae‐Eun Pi, Seung-Deok Ko, Kwang‐Wook Choi, Sang‐Hee Ko Park, Jun‐Bo Yoon · Small · 2015
A hybrid complementary logic inverter consisting of an n-type oxide thin-film transistor (TFT) and a microelectromechanical system switch is proposed as a promising alternative to p-type oxide TFTs by S.-H. K. Park, J.-B. Yoon, and co-workers for ultralow power integrated circuits. Monolithically integrated heterogeneous microdevices are shown on a flexible substrate with a MEMS switch vertically stacked on top of the n-type oxide TFT. On page 1390, the logic device shows a distinctive voltage transfer characteristic curve, very low static leakage, zero-short circuit current, and exceedingly high voltage gain.