Towards a free open source process and device simulation framework
Josef Weinbub, Karl Rupp, Lado Filipovic, Alexander Andreevich Makarov, S. Selberherr · 2012
We present an approach for implementing open source simulation tools in the field of semiconductor device and process simulation based on our execution framework ViennaX. We apply a modular concept, where functionality is separated into plugins, which in turn can be combined to form full-fledged simulation tools by utilizing ViennaX's task graph approach. Due to the applied plugin concept, a high degree of flexibility is introduced, as components can be easily exchanged. Simulation results are shown, depicting the applicability of our approach for different tools.