The operation of a capacitance manometer at 300 °C

Stephen J. Buckman, J. Gascoigne, K. B. Roberts · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984

The performance of a capacitance manometer operated at 300 °C is described. Calibration against a deadweight primary pressure standard indicates that the stability over a period of 3 months is better than 0.25% of the measured pressure over the pressure range 15–1000 Torr (2.04–131.6 kPa).

Read the paper · More papers on PaperTik