Using behavior modeling for proximity correction
Michael L. Rieger, John P. Stirniman · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994
A proximity correction system supporting zone-sampling behavior modeling (see SPIE 2197- 28, `Fast proximity correction with zone sampling,') is described. The data flow for correcting integrated circuit layout patterns is explained. We outline the steps needed to generate and optimize behavior models, that serve as correction `rules.'