Distributive and Cooperative Scheduling Considering Multi-Attribute Product-Mix, Feedback Process, and the Dynamic Utility Control-in Resource Sharing
Sumika Arima, Yuta Sato, Tomoya Saitou, Randall Perez, Y. Ishii, Kazuhiro Yasuda · IEEE International Symposium on Semiconductor Manufacturing conference proceedings · 2006
This paper introduces a distributive scheduling system of low computational complexity for a large manufacturing system. The scheduling system consists of a line balancer and dispatchers to cooperatively balance a target-TAT (turnaround time) in every process step by using slack time division rules and to dispatch product-mix WIPs to machines in each process step distributively by using P3D (Pseudo-Periodical Priority Dispatching) based rule which improves throughput during keep the target-TAT of every WIP. The scheduling rule effects are evaluated for actual semiconductor manufacturing factories of a wafer and an assembly processes.