Signal conditioning unit for piezoresistive based micro pressure sensors
Shailendra Kumar Sonkar, K. J. Suja, Jagadeesh Krishnan · 2014
Silicon piezoresistors are widely used in fabrication of micro pressure sensors and accelerometers. The problem associated with silicon based piezoresistive micro sensors is the dependency of resistance on temperature resulting in large thermal drift. This project is aiming to design a low cost signal conditioner to compensate the thermal drift prevailing inherently in the piezoresistive pressure sensors configured in Wheatstone bridge structure. This method provides digital approach to compensate thermal drift having better performance than Analog approach. Using the signal conditioner linearity improvement and offset compensation is achieved at the desired sensitivity.