Study on a Novel Capacitive Pressure Sensor with Large Dynamic Range
Tongtong Zhang, Zhengyuan Zhang · Advances in computer science research · 2015
In this paper, a novel capacitive pressure sensor with large dynamic range is presented.The working principle and the design structure of the sensor are demonstrated in the paper, then the theoretical calculation of mechanical properties, capacitance and the simulate results are performed.The study shows that the sensitivity of this capacitive pressure transducers is about 0.094f F/h Pa over the range of 20 ~ 100k Pa.The advantage of the structure is that it has a large dynamic range, higher tolerance against the environment than others and the measure flexible according to the demand.