Optimal device structure for Pipe-shaped BiCS Flash memory for ultra high density storage device with excellent performance and reliability
Megumi Ishiduki, Yoshiaki Fukuzumi, Ryota Katsumata, Masaru Kito, M. Kido, Hiroyasu Tanaka, Yosuke Komori, Yuzo Nagata, Tomoko Fujiwara, Takashi Maeda, Yoshimasa Mikajiri, Shigeto Oota, Makoto Honda, Yoshihisa Iwata, R. Kirisawa, Hideaki Aochi, Akihiro Nitayama · 2009
An asymmetric source/drain profile for select gate and metal salicided control gate are successfully realized on Pipe-shaped Bit Cost Scalable (P-BiCS) Flash memory to achieve data storage device with excellent performance and reliability.