End point detection on the time series process data
N. Kuramochi · International Symposium on Semiconductor Manufacturing · 2011
• The concept of the unit space and distance described in the MT system could be applied successfully to the end point detection of CMP process. • Distance in this case is normalized Euclidian distance. • Random noises could be reduced by moving average and increase in the distance coincident with contact to another layer could be detected with higher resolution than the time difference method. • Distance could also be enhanced to surpass the disturbance by the periodical noises. • New sensing method based on the evaluation of distance is effectual as an additional measure to detect the end point.