Process characterisation with dynamic test structures
Philippe Coll, Michel Robert, Daniel Auvergne, X. Regnier · Electronics Letters · 1993
Using explicit delay formulation, the Letter proposes a method for process characterisation with simple dynamic test structures. Validation of this method is first obtained with different levels of simulation models. Application to the ring oscillator is presented to demonstrate the possibility of defining average correlated parameters with direct coupling between delay modelling, level of simulations and real structures.