Ion Resonance Probe for the Measurement of Plasma Densities
Satoru Kiyama, Kiyoe Kato · Japanese Journal of Applied Physics · 1967
This paper describes a new resonance probe method for the measurement of plasma densities. The principle of this method lies in the fact that in a uniform plasma the ion resonance can be observed near the ion plasma frequency f p i , if the probe is biased sufficiently negative with respect to the space potential of the plasma. As the effect of the ion resonance on the rectified current out of the probe was very small, a direct-display method using a frequency swept signal generator was adopted. The density obtained by this method was compared with the one measured by a usual Langmuir probe. A good agreement was obtained between the two.