Evaluation of dynamic performance of pressure sensors using a pressure square-like wave generator
Tsing-Tshih Tsung, Lee-Long Han · Measurement Science and Technology · 2004
In this study, we measured the dynamic characteristics of pressure sensors using a pressure square-like wave generator (PSWG). With high excitation energy, the PSWG can measure dynamic pressure and work more effectively in a high frequency range. Under the same experimental parameters (10 bar, 600 Hz), the performance of six pressure sensors of dissimilar design and structure was evaluated. The experimental results indicate that they all exhibited extremely different dynamic characteristics. The dynamic pressure sensors based on quartz plates and crystals possess larger overshoot, greater gain margin and shorter rise time in comparison with other sensors based on strain gauge and piezoresistive materials. Compared with other traditional methods, such as the hydraulic control method, the PSWG proves to be superior in that it can be employed to evaluate the dynamic performances of pressure sensors at high frequency of above 10 kHz.