X-Ray Diffraction from Multilayer Structures with Statistically Distributed Microdefects
Vasily I. Punegov · physica status solidi (a) · 1993
The statistical dynamical theory of X-ray diffraction is applied to the analysis of simulated rocking curves (RCs) from multilayer systems with randomly distributed microdefects. Recursion formulae for calculating RCs in the general case of multiple diffraction on multilayer crystals are obtained for the Bragg-Bragg and Laue-Laue cases. The behaviour of coherently and incoherently scattered intensities for epitaxial films, heterostructures, and superlattices is discussed. It is shown that the alternation of the perfect and imperfect layers of the superlattice leads to the increase of the coherently scattered intensity of satellite peaks.