High-aspect-ratio neural probes for monolithic integration with ultra-low-power CMOS operational amplifier circuit
Tinghui Xin, Pratul K. Ajmera, Chuang Zhang, Ashok Srivastava · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004
A microprobe array for recording neural signals has been designed and fabricated for future monolithic integration with an ultra-low power CMOS operational amplifier circuit on a 2 mm × 2 mm chip. A LIGA-like process is employed utilizing UV lithography and electrodeposition techniques. Probes are fabricated on silicon substrate. The fabrication process is compatible with monolithic integration with CMOS signal processing circuitry. The probes are 210 um high and have an aspect ratio 3:1. Comments are made on processing issues related to chip-level monolithic integration.