Image sensor used in displacement measuring with high resolution
Xianghui Yuan, Guolin Lu, Tingchao Zhao · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993
A kind of specially designed MOS image sensor (IS) with high sensitivity is introduced in the paper. The IS is used to receive moire signals to form a phase-modulated signal. With dynamic phase discriminating and subdivision, a very high resolution and precision can be achieved. This special image sensor is valuable in practical designing of high resolution (