Nonlinear Forces Acting on Electrons in an Inhomogeneous Radio-Frequency Field of an Inductive Discharge
Padma Kant Shukla, Lennart STENFLO · Physica Scripta · 2001
Accounting for the combined effects of the ponderomotive and thermal forces, an improved expression for the ambipolar potential is deduced. It is shown that in weakly ionized radio-frequency inductive discharges the thermal force far exceeds the ponderomotive force.