Electrical damping of transient behavior in piezo-optical measurement systems

R. G. Dzhagupov, A. E. Pichugin · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993

Article consider a question of creating a fast and precision piezomechanical systems for optical measure elements control such as LCD matrix interferometers or other. The most general problem connected with it consist in suppressing oscillations in piezoelements mechanical transient behaviour which is the consequent of their low inside viscosity. Providing it with mechanical dampers has no quality effect because of too short movements in combination with high speed required for optical systems. This problem has a perfect decision with compensation electrical control signals of piezokeramical elements without using any of mechanical dampers. It is produced with limitation of electrical energy flow to piezoelements on their resonance frequencies. It is possible to achieve a complete disappearance of transient oscillations

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