Influence of process variation on the functionality of a high-pressure sensor
Joerg Muchow, Andre Kretschmann, Ralf Henn, Klaus Skrobanek, Stefan Finkbeiner, Hans-Reiner Krauß · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002
A sensor designer has to keep in mind a couple of things developing a new product. These are performance, reliability and last but not least cost. Cost is mainly a function of yield. To be successful on the market, it is therefore necessary to predict yield for a new design, based on its process steps. This can be done only by modeling a sensor based on process parameters as input to the models. How to realize this, will be shown for the design of a high pressure sensor.