Roadmap of the Flash Memory
R. Shirota · 2006
It has become 19 years, since the development of the NAND Flash started using 0.7..m rule in 1987. The speed of the scaling has been very fast and the period of the product of the new generation is less than 2 years. Now, design rule of the NAND Flash memory has become less than 70nm. There are some problems to interfere with the scaling of the memory cell. Basic idea to overcome these problems will be introduced in this talk.