Parameter monitoring: Advantages and pitfalls
M.M.A. van Rosmalen, Ke Th Baker, E.M.J.G. Bruls, J.A.G. Jess · 2002
Complex tests are often required for the measurement of certain IC parameters. Because these tests are too expensive to include in a production test, an alternative test method is studied. Additional structures that behave identically with respect to the considered parameter, called monitors, are placed near the original structures. If a strong spatial correlation exists for the parameter, the parameter values of the monitors can be used to predict the parameter values of the products. It is shown that, by means of monitor measurement data regression, the prediction can be improved. An analysis of the resulting prediction error is presented, which is used to evaluate the method for specific cases.>