A test data collection system for uniform data analysis
S.D. Shaye · 2002
This paper describes a system that concentrates on data collection to provide uniform data analysis. The result is an integrated data collection and analysis system designed for semiconductor manufacturers. It includes automatic data insertion programs using distributed databases for data storage. It has a statistical analysis package designed with a graphical user interface. The system provides data collection for all data types regardless of the data origin so that users can perform data analysis. For the examples, three devices from a single product line are tested on three different testers. Each tester executes the same tests. The test data files are inserted into a common database format so they can be analyzed.