A PN-based scheduler for a flexible semiconductor manufacturing system

Salvatore Cavalieri, Orazio Mirabella · 2002

The paper describes an approach to scheduling in a flexible semiconductor manufacturing system. The approach uses off-line scheduling as a basis for managing activities but integrates it with online scheduling whenever a modification in operating conditions requires a change in the scheduling previously drawn up. Petri nets (PNs) have been used as formal tool, for modelling and solving the scheduling problem.

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