Micromachined 2-D array piezoelectrically actuated flextensional transducers
Gökhan Perçin, Butrus T. Khuri-Yakub · 2002
This paper presents micromachined two dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report an an optimum design for an individual array element based on finite element modelling (FEM). We manufacture the transducer in two dimensional arrays using planar silicon micromachining. Such an array could be combined with an on-board driving and an addressing circuitry.