Microsensors and microactuators using ferroelectric thin films
Masanori Okuyama · 2002
Various microsensor and microactuators using ferroelectric thin films such as infrared sensors, ultrasonic sensors, piezoelectric actuators and optical switches have been reviewed with the other electronic devices of semiconductor memories and electroluminescent device with low-threshold voltage. A series or technical data for preparing ferroelectric thin films such as PbTiO/sub 3/, PZT, PLZT and BST by using various methods such as RF sputtering, laser ablation, chemical vapor deposition and the sol-gel method are described. The obtained thin films show very good ferroelectric, pyroelectric, piezoelectric and electro-optic properties.