The selection and creation of the rules in rules-based optical proximity correction
Rui Zhi Shi, Yici Cai, Xianlong Hong, Weimin Wu, Changqi Yang · 2002
Considering the efficiency and veracity of rules-based OPC applied to recent large-scale layout, we firstly point out the importance of the selection and creation of rules in rules-based OPC. Our discussion addresses the crucial factors in selecting and creating rules as well as how we select and create more concise and practical rules-base. Based on our ideas we suggest four primary rules and as a result we show some rule data in table. The automatic construction of the rules-base called OPCL is an important part of the whole rules-based OPC software.