Device and Process Technologies for Microelectronics, Mems, Photonics, and Nanotechnology IV
Hark Hoe Tan, J.‐C. Chiao, L. Faraone, C. Jagadish, J. S. Williams, A Wilson · 2007
Sponsored by SPIE Cosponsored by The Australian National University (Australia) Australian Research Council Nanotechnology Network (Australia) COSNet-ARC Complex Open Systems Research Network (Australia) CUDOS (Australia) RPO (Australia) Bandwidth Foundry (Australia) Cooperating Organizations Research School of Physical Sciences and Engineering, Canberra (Australia) Centre for Biomedical Engineering, Adelaide (Australia) Published by SPIE 2008 SPIE Digital Library -- Subscriber Archive Copy