Temperature Compensation and Shunt Calibration of Semiconductor Pressure Transducers
Joseph R. Mallon, Herbert Bernstein · 1983
Abstract : Silicon integrated sensor transducers are conventionally temperature compensated by the use of simple passive resistor networks. These networks serve to trim the bridge temperature coefficients to achieve the desired performance. This paper presents several techniques commonly used for this type of transducer. These circuits are presented to allow full understanding by the user of the operation of such transducers and to provide a basis for the thermal compensation of custom flexures and transducer structures employing semiconductor sensors. A novel integrated sensor employing on-chip compensation is presented. (Author)