Parameter estimation in a dynamic model for rapid thermal processing: theory and experimental results
Sergey Belikov, Michael B. Kaplinsky, Bernard Friedland · 2005
The state variables of the dynamics of heat transfer in a rapid thermal processing system can be efficiently represented by the coefficients of a Bessel function expansion of the temperature distribution in a circular wafer. An algorithm developed in 1993 by Friedland is investigated for estimating parameters in the differential equations for the Bessel coefficients. Simulation results, which show excellent performance, are supported by favorable experimental results obtained in an actual RTP chamber.