An object-oriented design for efficient microsystem simulation
Markus Emmenegger, Henry P. Baltes · Repository for Publications and Research Data (ETH Zurich) · 1999
This thesis presents a Solution to the Simulation requirements of an engineer designing electro-thermo-mechanical microsystems.To efficiently design micro¬ systems, we require to understandthe inner workings of these Systems, know how energy is transferred inside the devices, and how the Output signals come about.A wide ränge of physical effects is exploited in microsystems.At the very mim- murn, electrical, thermal and mechanical effects, as well as the coupling between