Petri Net as a Manufacturing System Scheduling Tool
Tauseef Aized · Sciyo eBooks · 2010
Multiple cluster tool systems have emerged as an important semiconductor manufacturing system technology with the benefits of higher yield, shorter cycle time and tighter process control. This study has described a modelling technique using coloured Petri net to capture random failures of multiple cluster tool system and has shown that random failure is an important system limitation as far as throughput and cycle time are concerned. The random failures of cluster tools may be avoided by achieving a higher value of mean time between failures of process modules compared with process execution times. This multiple cluster tool system problem under discussion can be extended to incorporate the random failure modelling of internal robotic arms and AGV based transporters between clusters.