A high density CMOS process
Rolf E. Luscher, Jacssel Zaldívar · 1985
A 3μ CMOS process yielding circuit densities comparable to 1.5μ design rules will be reported. The procedure was used to construct an 8b microcomputer for telecom use: clock frequency was 20MHz at 9V; 50k transistors were placed in an area of 31mm2.