Mathematical Analysis of Partial Differential Equations Modeling Electrostatic MEMS
Pierpaolo Esposito, Nassif Ghoussoub, Yujin Guo · Courant lecture notes in mathematics · 2010
Micro- and nanoelectromechanical systems (MEMS and NEMS), which combine electronics with miniature-size mechanical devices, are essential components of modern technology. It is the mathematical model describing "electrostatically actuated" MEMS that is addressed in this monograph. Even the simplified models that the authors deal with still lead to very interesting second- and fourth-order nonlinear elliptic equations (in the stationary case) and to nonlinear parabolic equations (in the dynamic case). While nonlinear eigenvalue problems-where the stationary MEMS models fit-are a well-developed