Delay defect screening using process monitor structures

Subhasish Mitra, Erik H. Volkerink, Edward J. McCluskey, S. Eichenberger · 2004

This paper presents delay test data collected from test chips fabricated in a 0.18 /spl mu/ technology. The experimental data shows that process monitor structures such as on-chip ring oscillators are effective in identifying slow parts while performing transition fault testing at frequencies slower than the rated frequency.

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