Algorithmic Approaches for System‐Level Simulation of MEMS and Aspects of Cosimulation
Peter Schneider, Christoph Clauß, Ulrich Donath, Günter Elst, Olaf Enge‐Rosenblatt, Thomas Uhle · Advanced micro & nanosystems · 2013
Common algorithmic approaches for an efficient system-level simulation include methods for nonlinear network simulation, hybrid simulation methods, and cosimulation techniques. This chapter describes these methods. It first discusses in more detail the different types of mathematical representations of microelectromechanical systems (MEMS). The chapter then presents approaches of system-level model description methods. The mathematical task of simulating MEMS is generally solving differential algebraic equations (DAEs). Since nonlinear DAEs cannot be solved analytically in most cases, the DAEs are usually solved numerically. The chapter discusses numerical methods for system-level simulation. Next, it describes methods for handling discontinuous forcing functions and structural changes of DAE systems. Controlled Vocabulary Terms convergence of numerical methods; differential algebraic equations; micromechanical devices; power system simulation