Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm
Bahram Azizollah Ganji, Nateri · International Journal of Engineering, Transactions B: Applications · 2010
external amplifier was able to detect the sound waves from microphone on speaker and oscilloscope. The maximum amplitude of output speech signal of amplifier is 45 mV, and the maximum output of MEMS microphone is 1.125 µV.