A Battery Operated Microsystem For Flow Measurements
M. Pierre, B. Steenis, J. Hermann, J.-P. Bardyn · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005
A microsystem whose function is to extract the frequency of a differential pressure in a fluid is presented. This system is combined with a fluidic oscillator for flow measurement applications. It is composed of a capacitive pressure sensor and an ASIC allowing measurement of frequencies from 0.15 to 45 Hz for differential pressures from 0.6 Pa to 60 kPa. The system works from 5/spl deg/C to 90 /spl deg/C with a nominal battery voltage of 3 V. Its consumption is less than 10 /spl mu/A.