Wavelet shrinkage-based noise reduction from the high resolution X-ray images of epitaxial layers
J. Kozłowski, J. Serafińczuk, Andrzej Kozik · 2003
This paper presents advantages of employing the wavelet method in X-ray high-resolution image analysis of nanostructures. It is shown that many more details of the structure examined can be distinguished in rocking curves (RC) as well as in reciprocal space maps (RSM) after application of the numerical procedure. The method proposed seems to be particularly suitable for imperfect epitaxial layers having significant lattice mismatch with respect to substrate. By means of the wavelet analysis of the X-ray images using de-noising procedure details invisible in raw pictures can be detected such as thickness fringes, gradient of lattice parameters etc., and duration of measurements can be shortened. Key words: wavelet, X-ray; epitaxial layer 1.