Electrical Adjustment for Intelligent Sensor
Makio Iida, Yoshihiko Isobe, Yoshimi Yoshino, Iwao Yokomori, Hiroki Tanaka · SAE technical papers on CD-ROM/SAE technical paper series · 1990
We have developed Polycrystalline Silicon Digital Trimming (PDT). This method is a type of electrical adjustment for intelligent sensors. PDT uses the resistance decrease of doped polycrystalline silicon resistors due to excess current conduction. The circuit consists of doped polycrystalline silicon resistors, write transistors, comparators and R - 2R resistors. This method needs only a modification of the dopant in the polycrystalline silicon of the CMOS fabrication process which is easily integrated with the intelligent sensor.