Coplanar waveguide technique for measurement of dielectric constant or thickness of dielectric films
M.K. Waldo, Irving Kaufman, Samir El‐Ghazaly · 2002
This paper presents results of an investigation aimed at using a coplanar waveguide resonator for virtually instantaneous measurement of the thickness or dielectric constant of insulating films on an open structure. Among possible applications are process monitoring, measurement of liquid films, and the detection of thin ice deposits on aircraft surfaces.